Vibration control of cryopump with an active dynamic vibration absorber

Vibration control of cryopump with an active dynamic vibration absorber

A vibration isolation device with an active dynamic vibration absorber is developed to remove vibration induced by a cryopump. Cryopump is used to make high-vacuum and low-temperature environments for precise measurement. However, it induces vibrations with multiple frequencies, which may deteriorat...

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Bibliographic Details
Main Authors: Takeshi MIZUNO, Takahito IIDA, Yuji ISHINO, Masaya TAKASAKI, Masayuki HARA, Daisuke YAMAGUCHI, Takeshi KANO
Format: Article
Language:Japanese
Published: The Japan Society of Mechanical Engineers 2019-04-01
Series:Nihon Kikai Gakkai ronbunshu
Subjects:
cryopump
active dynamic vibration absorber
vibration control
internal model principle
low frequency
pole assignment
output regulation
Online Access:https://www.jstage.jst.go.jp/article/transjsme/85/873/85_18-00461/_pdf/-char/en

Internet

https://www.jstage.jst.go.jp/article/transjsme/85/873/85_18-00461/_pdf/-char/en

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