Vibration control of cryopump with an active dynamic vibration absorber
A vibration isolation device with an active dynamic vibration absorber is developed to remove vibration induced by a cryopump. Cryopump is used to make high-vacuum and low-temperature environments for precise measurement. However, it induces vibrations with multiple frequencies, which may deteriorat...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2019-04-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/85/873/85_18-00461/_pdf/-char/en |
| _version_ | 1811220984633491456 |
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| author | Takeshi MIZUNO Takahito IIDA Yuji ISHINO Masaya TAKASAKI Masayuki HARA Daisuke YAMAGUCHI Takeshi KANO |
| author_facet | Takeshi MIZUNO Takahito IIDA Yuji ISHINO Masaya TAKASAKI Masayuki HARA Daisuke YAMAGUCHI Takeshi KANO |
| author_sort | Takeshi MIZUNO |
| collection | DOAJ |
| description | A vibration isolation device with an active dynamic vibration absorber is developed to remove vibration induced by a cryopump. Cryopump is used to make high-vacuum and low-temperature environments for precise measurement. However, it induces vibrations with multiple frequencies, which may deteriorate measurement accuracy. This study focuses on removing the vibration of low frequencies because conventional vibration isolation devices for cryopump can hardly remove them. In the developed vibration isolation device, an active vibration absorber is used to remove the vibration efficiently at low frequencies. The controller is designed based on the internal model principle. The pole assignment is used to tune the controller. The efficacy of the designed and tuned controller is demonstrated in the developed apparatus. |
| first_indexed | 2024-04-12T07:51:05Z |
| format | Article |
| id | doaj.art-52b69ead57d64e55a282aef48bfd8247 |
| institution | Directory Open Access Journal |
| issn | 2187-9761 |
| language | Japanese |
| last_indexed | 2024-04-12T07:51:05Z |
| publishDate | 2019-04-01 |
| publisher | The Japan Society of Mechanical Engineers |
| record_format | Article |
| series | Nihon Kikai Gakkai ronbunshu |
| spelling | doaj.art-52b69ead57d64e55a282aef48bfd82472022-12-22T03:41:35ZjpnThe Japan Society of Mechanical EngineersNihon Kikai Gakkai ronbunshu2187-97612019-04-018587318-0046118-0046110.1299/transjsme.18-00461transjsmeVibration control of cryopump with an active dynamic vibration absorberTakeshi MIZUNO0Takahito IIDA1Yuji ISHINO2Masaya TAKASAKI3Masayuki HARA4Daisuke YAMAGUCHI5Takeshi KANO6Department of Mechanical Engineering, Saitama UniversityDepartment of Mechanical Engineering, Saitama UniversityDepartment of Mechanical Engineering, Saitama UniversityDepartment of Mechanical Engineering, Saitama UniversityDepartment of Mechanical Engineering, Saitama UniversityDepartment of Mechanical Engineering, Saitama UniversityVIC International Co. Ltd.A vibration isolation device with an active dynamic vibration absorber is developed to remove vibration induced by a cryopump. Cryopump is used to make high-vacuum and low-temperature environments for precise measurement. However, it induces vibrations with multiple frequencies, which may deteriorate measurement accuracy. This study focuses on removing the vibration of low frequencies because conventional vibration isolation devices for cryopump can hardly remove them. In the developed vibration isolation device, an active vibration absorber is used to remove the vibration efficiently at low frequencies. The controller is designed based on the internal model principle. The pole assignment is used to tune the controller. The efficacy of the designed and tuned controller is demonstrated in the developed apparatus.https://www.jstage.jst.go.jp/article/transjsme/85/873/85_18-00461/_pdf/-char/encryopumpactive dynamic vibration absorbervibration controlinternal model principlelow frequencypole assignmentoutput regulation |
| spellingShingle | Takeshi MIZUNO Takahito IIDA Yuji ISHINO Masaya TAKASAKI Masayuki HARA Daisuke YAMAGUCHI Takeshi KANO Vibration control of cryopump with an active dynamic vibration absorber Nihon Kikai Gakkai ronbunshu cryopump active dynamic vibration absorber vibration control internal model principle low frequency pole assignment output regulation |
| title | Vibration control of cryopump with an active dynamic vibration absorber |
| title_full | Vibration control of cryopump with an active dynamic vibration absorber |
| title_fullStr | Vibration control of cryopump with an active dynamic vibration absorber |
| title_full_unstemmed | Vibration control of cryopump with an active dynamic vibration absorber |
| title_short | Vibration control of cryopump with an active dynamic vibration absorber |
| title_sort | vibration control of cryopump with an active dynamic vibration absorber |
| topic | cryopump active dynamic vibration absorber vibration control internal model principle low frequency pole assignment output regulation |
| url | https://www.jstage.jst.go.jp/article/transjsme/85/873/85_18-00461/_pdf/-char/en |
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