Growth of polycrystalline gallium oxide films in stagnant oxygen stream ambient
Structural, morphological, optical, and electrical characteristics of polycrystalline gallium oxide (Ga2O3) films subjected to different post-deposition annealing temperatures (400–1000 °C) in a stagnant oxygen stream ambient were systematically studied. The transformation from γ-Ga2O3 to β-Ga2O3 ph...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-01-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785421014411 |