Design and fabrication of an electrothermal MEMS micro-actuator with 3D printing technology
This study presents the design and fabrication results of an electrothermal micro-electro-mechanical system (MEMS) actuator. Unlike traditional one-directional U-shaped actuators, this bi-directional electrothermal (BET) micro-actuator can produce displacements in two directions as a single device....
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| Format: | Article |
| Language: | English |
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IOP Publishing
2020-01-01
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| Series: | Materials Research Express |
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| Online Access: | https://doi.org/10.1088/2053-1591/aba8e3 |