Luminescence confocal microscopy of 3D components of photonic integrated circuits fabricated by two-photon photopolymerization

Luminescence confocal microscopy of 3D components of photonic integrated circuits fabricated by two-photon photopolymerization

Direct laser writing (DLW) lithography has been growing rapidly and is widely used for photonic integrated circuit (PIC) fabrication manufacturing in micro optics and photonics to fabricate 2D, 2.5D, and 3D components due to low cost, high precision and no need for mask exposure. There is a huge dem...

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Bibliographic Details
Main Authors: Rilond P. Matital, Danila A. Kolymagin, Dmytro A. Chubich, Denis D. Merkushev, Alexei G. Vitukhnovsky
Format: Article
Language:English
Published: Elsevier 2022-06-01
Series:Journal of Science: Advanced Materials and Devices
Subjects:
Photonics wire bond
Direct laser writing
Confocal
Luminescence
3D structure
Online Access:http://www.sciencedirect.com/science/article/pii/S2468217921000952

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http://www.sciencedirect.com/science/article/pii/S2468217921000952

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