Tuning bilayer period of AlN/CrN superlattice coatings deposited using cathodic arc technique for superior mechanical properties and thermal stability
In the present work, a comprehensive study on the effect of the bilayer period on the mechanical properties of AlN/CrN superlattice coatings deposited using the cathodic arc technique is reported. AlN/CrN superlattice structures with different individual layer thicknesses (3.5/4.5, 3.5/3.5, 3.5/3.0,...
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Elsevier
2022-02-01
|
Series: | Applied Surface Science Advances |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2666523921001513 |