Preparation, microstructure and properties of LaCePr polishing slurry for optical glass CMP

Preparation, microstructure and properties of LaCePr polishing slurry for optical glass CMP

Objectives: In recent years, cerium-based rare earth polishing liquids have been widely used in the field of chemical mechanical polishing (CMP) of glass and other materials due to their excellent selectivity and good polishing efficiency, but their polishing performance needs to be further improved...

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Bibliografski detalji
Glavni autori: Quanxin ZHANG, Huping LI, Junlong SHI, Ai SU, Guiqing CHEN, Hao XIE, Yupei JIN, Guangshou HU
Format: Članak
Jezik:zho
Izdano: Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. 2024-12-01
Serija:Jin'gangshi yu moliao moju gongcheng
Teme:
chemical mechanical polishing (cmp)
optical glass
polishing slurry
preparation
microstructure and properties
Online pristup:http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2023.0225

Internet

http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2023.0225

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