Generalized method of computer-aided design of technological processes for MEMS accelerometers manufacturing
A generalized method for the automated design of technological processes for the production of MEMS accelerometers is developed. This method is based on two methods: the method of selecting a standard technological processes and the method of searching for analogues of individual subsystems and elem...
| 主要な著者: | , , |
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| フォーマット: | 論文 |
| 言語: | Russian |
| 出版事項: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| シリーズ: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| 主題: | |
| オンライン･アクセス: | https://doklady.bsuir.by/jour/article/view/988 |