The Structural Evolution of Semipolar (11−22) Plane AlN Tem-Plate on <i>m</i>-Plane Sapphire Prepared by Sputtering and High Temperature Annealing

The Structural Evolution of Semipolar (11−22) Plane AlN Tem-Plate on <i>m</i>-Plane Sapphire Prepared by Sputtering and High Temperature Annealing

In this work, the epitaxial semipolar (11–22) AlN was prepared on nonpolar <i>m</i>-sapphire substrate by combining sputtering and high-temperature annealing. According to our systematic measurements and analysis from XRD, Raman spectra, and AFM, the evolution of crystalline structure an...

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Bibliographic Details
Main Authors: Fabi Zhang, Jin Zhang, Lijie Huang, Shangfeng Liu, Wei Luo, Junjie Kang, Zhiwen Liang, Jiakang Cao, Chenhui Zhang, Qi Wang, Ye Yuan
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Materials
Subjects:
aluminum nitride
high temperature annealing
semi-polarized template
Online Access:https://www.mdpi.com/1996-1944/15/8/2945

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https://www.mdpi.com/1996-1944/15/8/2945

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