Nanoimprinting for all-polymer electro-optic waveguide devices
We performed the design and fabrication of polymer waveguide circuits, aiming for applications as electro-optic devices. Uniform waveguides with over one centimeter of length were fabricated by soft nanoimprint lithography. These multimode waveguides present a height of 3 µm and low surface roughnes...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2023-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_04035.pdf |