Design, Fabrication and Measurement of Radio Frequency Micro-Electro-Mechanical Systems

Design, Fabrication and Measurement of Radio Frequency Micro-Electro-Mechanical Systems

This article describes the fabrication and experimental results of a novel step structure Radio Frequency Microelectromechanical system (RF MEMS) switch integrated with a circular patch antenna. The RF MEMS switch is developed using surface micromachining technology and exhibits several desirable ch...

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Bibliographic Details
Main Authors: Girija Sravani Kondavitee, Young Suh Song, Srinivasa Rao Karumuri, Koushik Guha, Brajesh Kumar Kaushik, Aime Lay-Ekuakille
Format: Article
Language:English
Published: IEEE 2023-01-01
Series:IEEE Open Journal of Nanotechnology
Subjects:
RF MEMS switch
pull-in voltage
return loss
insertion loss
isolation
surface micromachining
Online Access:https://ieeexplore.ieee.org/document/10269333/

Internet

https://ieeexplore.ieee.org/document/10269333/

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