Fabrication of mems devices – a scanning micro mirror case study
This paper presents the working principle, design, and fabrication of a silicon-based scanning micromirror with a new type of action mechanism as an example of MEMS (Micro-Electro-Mechanical Systems). Micromirrors can be found in barcode readers as well as micro-projectors, optical coherence tomogra...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Instituto Tecnológico Metropolitano
2017-05-01
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| Series: | TecnoLógicas |
| Subjects: | |
| Online Access: | http://itmojs.itm.edu.co/index.php/tecnologicas/article/view/1048/932 |