Superconducting Tunable Microstrip Gap Resonators Using Low Stress RF MEMS Fabrication Process

Superconducting Tunable Microstrip Gap Resonators Using Low Stress RF MEMS Fabrication Process

A Nb superconducting tunable microstrip gap resonator has been designed and fabricated with low stress Au RF MEMS dc-contact switches. The resonator can be tuned in four states from 12-15 GHz. Simulations show that the resonator Q is highly sensitive to the contact resistance of the MEMS when the sw...

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Bibliographic Details
Main Authors: Robert R. Benoit, N. Scott Barker
Format: Article
Language:English
Published: IEEE 2017-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
RF MEMS
cryogenics
superconducting resonators
tunable circuits
devices
Online Access:https://ieeexplore.ieee.org/document/7935538/

Internet

https://ieeexplore.ieee.org/document/7935538/

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