Micro-Raman Characterization of Structural Features of High-k Stack Layer of SOI Nanowire Chip, Designed to Detect Circular RNA Associated with the Development of Glioma

Micro-Raman Characterization of Structural Features of High-k Stack Layer of SOI Nanowire Chip, Designed to Detect Circular RNA Associated with the Development of Glioma

The application of micro-Raman spectroscopy was used for characterization of structural features of the high-k stack (h-k) layer of “silicon-on-insulator” (SOI) nanowire (NW) chip (h-k-SOI-NW chip), including Al<sub>2</sub>O<sub>3</sub> and HfO<sub>2</sub> in vari...

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Bibliographic Details
Main Authors: Yuri D. Ivanov, Kristina A. Malsagova, Vladimir P. Popov, Igor N. Kupriyanov, Tatyana O. Pleshakova, Rafael A. Galiullin, Vadim S. Ziborov, Alexander Yu. Dolgoborodov, Oleg F. Petrov, Andrey V. Miakonkikh, Konstantin V. Rudenko, Alexander V. Glukhov, Alexander Yu. Smirnov, Dmitry Yu. Usachev, Olga A. Gadzhieva, Boris A. Bashiryan, Vadim N. Shimansky, Dmitry V. Enikeev, Natalia V. Potoldykova, Alexander I. Archakov
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Molecules
Subjects:
nanowire chip
SOI
circular RNA
circ-SHKBP1
micro-Raman spectroscopy
high-k stack layer
Online Access:https://www.mdpi.com/1420-3049/26/12/3715

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https://www.mdpi.com/1420-3049/26/12/3715

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