Magnetron Sputter Deposition of Nanostructured AlN Thin Films

Magnetron Sputter Deposition of Nanostructured AlN Thin Films

Aluminum nitride (AlN) is a material of growing interest for power electronics, fabrication of sensors, micro-electromechanical systems, and piezoelectric generators. For the latter, the formation of nanowire arrays or nanostructured films is one of the emerging research directions. In the current w...

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Bibliographic Details
Main Authors: Manohar Chirumamilla, Tobias Krekeler, Deyong Wang, Peter K. Kristensen, Martin Ritter, Vladimir N. Popok, Kjeld Pedersen
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Applied Nano
Subjects:
magnetron sputter deposition
aluminum nitride
nanostructures
glancing angle deposition
piezoelectric materials
Online Access:https://www.mdpi.com/2673-3501/4/4/16

Internet

https://www.mdpi.com/2673-3501/4/4/16

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