Magnetron Sputter Deposition of Nanostructured AlN Thin Films
Aluminum nitride (AlN) is a material of growing interest for power electronics, fabrication of sensors, micro-electromechanical systems, and piezoelectric generators. For the latter, the formation of nanowire arrays or nanostructured films is one of the emerging research directions. In the current w...
| Auteurs principaux: | , , , , , , |
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| Format: | Article |
| Langue: | English |
| Publié: |
MDPI AG
2023-10-01
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| Collection: | Applied Nano |
| Sujets: | |
| Accès en ligne: | https://www.mdpi.com/2673-3501/4/4/16 |