An Approach to the Extreme Miniaturization of Rotary Comb Drives

An Approach to the Extreme Miniaturization of Rotary Comb Drives

The evolution of microelectronic technologies is giving constant impulse to advanced micro-scaled systems which perform complex operations. In fact, the actual micro and nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering and decision-making electronics together with a...

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Bibliographic Details
Main Authors: Andrea Veroli, Alessio Buzzin, Fabrizio Frezza, Giampiero de Cesare, Muhammad Hamidullah, Ennio Giovine, Matteo Verotti, Nicola Pio Belfiore
Format: Article
Language:English
Published: MDPI AG 2018-10-01
Series:Actuators
Subjects:
microactuation
nanoactuation
comb drives
flexure hinge
nanofabrication
electron beam lithography
Online Access:http://www.mdpi.com/2076-0825/7/4/70

Internet

http://www.mdpi.com/2076-0825/7/4/70

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