An Approach to the Extreme Miniaturization of Rotary Comb Drives
The evolution of microelectronic technologies is giving constant impulse to advanced micro-scaled systems which perform complex operations. In fact, the actual micro and nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering and decision-making electronics together with a...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-10-01
|
| Series: | Actuators |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2076-0825/7/4/70 |
| _version_ | 1819239915187077120 |
|---|---|
| author | Andrea Veroli Alessio Buzzin Fabrizio Frezza Giampiero de Cesare Muhammad Hamidullah Ennio Giovine Matteo Verotti Nicola Pio Belfiore |
| author_facet | Andrea Veroli Alessio Buzzin Fabrizio Frezza Giampiero de Cesare Muhammad Hamidullah Ennio Giovine Matteo Verotti Nicola Pio Belfiore |
| author_sort | Andrea Veroli |
| collection | DOAJ |
| description | The evolution of microelectronic technologies is giving constant impulse to advanced micro-scaled systems which perform complex operations. In fact, the actual micro and nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering and decision-making electronics together with all sorts of sensors and actuators. Mechanical manipulation can be obtained through microactuators, taking advantage of magnetostrictive, thermal, piezoelectric or electrostatic forces. Electrostatic actuation, more precisely the comb-drive approach, is often employed due to its high versatility and low power consumption. Moreover, the device design and fabrication process flow can be simplified by compliant mechanisms, avoiding complex elements and unorthodox materials. A nano-scaled rotary comb drive is herein introduced and obtained using NEMS technology, with an innovative design which takes advantages of the compliant mechanism characteristics. A theoretical and numerical study is also introduced to inspect the electro-mechanical behavior of the device and to describe a new technological procedure for its fabrication. |
| first_indexed | 2024-12-23T13:59:42Z |
| format | Article |
| id | doaj.art-5580d6776ea642b79fccc9f40aac6260 |
| institution | Directory Open Access Journal |
| issn | 2076-0825 |
| language | English |
| last_indexed | 2024-12-23T13:59:42Z |
| publishDate | 2018-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Actuators |
| spelling | doaj.art-5580d6776ea642b79fccc9f40aac62602022-12-21T17:44:21ZengMDPI AGActuators2076-08252018-10-01747010.3390/act7040070act7040070An Approach to the Extreme Miniaturization of Rotary Comb DrivesAndrea Veroli0Alessio Buzzin1Fabrizio Frezza2Giampiero de Cesare3Muhammad Hamidullah4Ennio Giovine5Matteo Verotti6Nicola Pio Belfiore7Department of Information Engineering, Electronics and Telecommunications, University of Rome La Sapienza, 00156 Rome, ItalyDepartment of Information Engineering, Electronics and Telecommunications, University of Rome La Sapienza, 00156 Rome, ItalyDepartment of Information Engineering, Electronics and Telecommunications, University of Rome La Sapienza, 00156 Rome, ItalyDepartment of Information Engineering, Electronics and Telecommunications, University of Rome La Sapienza, 00156 Rome, ItalyDepartment of Information Engineering, Electronics and Telecommunications, University of Rome La Sapienza, 00156 Rome, ItalyInstitute of Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156 Rome, ItalyUniversity of Rome Niccolò Cusano, 00156 Rome, ItalyDepartment of Engineering, University of Roma Tre, 00156 Rome, ItalyThe evolution of microelectronic technologies is giving constant impulse to advanced micro-scaled systems which perform complex operations. In fact, the actual micro and nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering and decision-making electronics together with all sorts of sensors and actuators. Mechanical manipulation can be obtained through microactuators, taking advantage of magnetostrictive, thermal, piezoelectric or electrostatic forces. Electrostatic actuation, more precisely the comb-drive approach, is often employed due to its high versatility and low power consumption. Moreover, the device design and fabrication process flow can be simplified by compliant mechanisms, avoiding complex elements and unorthodox materials. A nano-scaled rotary comb drive is herein introduced and obtained using NEMS technology, with an innovative design which takes advantages of the compliant mechanism characteristics. A theoretical and numerical study is also introduced to inspect the electro-mechanical behavior of the device and to describe a new technological procedure for its fabrication.http://www.mdpi.com/2076-0825/7/4/70microactuationnanoactuationcomb drivesflexure hingenanofabricationelectron beam lithography |
| spellingShingle | Andrea Veroli Alessio Buzzin Fabrizio Frezza Giampiero de Cesare Muhammad Hamidullah Ennio Giovine Matteo Verotti Nicola Pio Belfiore An Approach to the Extreme Miniaturization of Rotary Comb Drives Actuators microactuation nanoactuation comb drives flexure hinge nanofabrication electron beam lithography |
| title | An Approach to the Extreme Miniaturization of Rotary Comb Drives |
| title_full | An Approach to the Extreme Miniaturization of Rotary Comb Drives |
| title_fullStr | An Approach to the Extreme Miniaturization of Rotary Comb Drives |
| title_full_unstemmed | An Approach to the Extreme Miniaturization of Rotary Comb Drives |
| title_short | An Approach to the Extreme Miniaturization of Rotary Comb Drives |
| title_sort | approach to the extreme miniaturization of rotary comb drives |
| topic | microactuation nanoactuation comb drives flexure hinge nanofabrication electron beam lithography |
| url | http://www.mdpi.com/2076-0825/7/4/70 |
| work_keys_str_mv | AT andreaveroli anapproachtotheextrememiniaturizationofrotarycombdrives AT alessiobuzzin anapproachtotheextrememiniaturizationofrotarycombdrives AT fabriziofrezza anapproachtotheextrememiniaturizationofrotarycombdrives AT giampierodecesare anapproachtotheextrememiniaturizationofrotarycombdrives AT muhammadhamidullah anapproachtotheextrememiniaturizationofrotarycombdrives AT enniogiovine anapproachtotheextrememiniaturizationofrotarycombdrives AT matteoverotti anapproachtotheextrememiniaturizationofrotarycombdrives AT nicolapiobelfiore anapproachtotheextrememiniaturizationofrotarycombdrives AT andreaveroli approachtotheextrememiniaturizationofrotarycombdrives AT alessiobuzzin approachtotheextrememiniaturizationofrotarycombdrives AT fabriziofrezza approachtotheextrememiniaturizationofrotarycombdrives AT giampierodecesare approachtotheextrememiniaturizationofrotarycombdrives AT muhammadhamidullah approachtotheextrememiniaturizationofrotarycombdrives AT enniogiovine approachtotheextrememiniaturizationofrotarycombdrives AT matteoverotti approachtotheextrememiniaturizationofrotarycombdrives AT nicolapiobelfiore approachtotheextrememiniaturizationofrotarycombdrives |