Three-to-One Internal Resonance in MEMS Arch Resonators
We present an investigation of the nonlinear dynamics of a microelectromechanical system (MEMS) arch subjected to a combination of AC and DC loadings in the presence of three-to-one internal resonance. The axial force resulting from the residual stress or temperature variation is considered in the g...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-04-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/19/8/1888 |