Integration of functional complex oxide nanomaterials on silicon
The combination of standard wafer-scale semiconductor processing with the properties of functional oxides opens up to innovative and more efficient devices with high value applications that can be produced at large scale. This review uncovers the main strategies that are successfully used to monolit...
Main Authors: | , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Frontiers Media S.A.
2015-06-01
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Series: | Frontiers in Physics |
Subjects: | |
Online Access: | http://journal.frontiersin.org/Journal/10.3389/fphy.2015.00038/full |