Characterization of Thin Carbon Films Produced by the Magnetron Sputtering Technique

Characterization of Thin Carbon Films Produced by the Magnetron Sputtering Technique

Thin carbon films containing both amorphous and crystalline structures were produced by RF magnetron sputtering. The depositions of the carbon films were performed on Co buffer layers previously deposited on c-plane (0001) sapphire substrates. The thin carbon films were characterized by high-resolut...

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Bibliographic Details
Main Authors: Danilo Lopes Costa e Silva, Luciana Reyes Pires Kassab, Jose Roberto Martinelli, Antonio Domingues dos Santos, Sidney José Lima Ribeiro, Moliria Vieira dos Santos
Format: Article
Language:English
Published: Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2016-04-01
Series:Materials Research
Subjects:
Carbon films
Graphene
Sputtered carbon
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Online Access:http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392016000300669&tlng=en

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http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392016000300669&tlng=en

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