Coupling Supramolecular Assemblies and Reactive Oxygen Species (ROS) with Megasonic Action for Applications in Shallow Trench Isolation (STI) Post-Chemical Mechanical Planarization (p-CMP) Cleaning

Coupling Supramolecular Assemblies and Reactive Oxygen Species (ROS) with Megasonic Action for Applications in Shallow Trench Isolation (STI) Post-Chemical Mechanical Planarization (p-CMP) Cleaning

Bibliographic Details
Main Authors: Katherine M. Wortman-Otto, Don Watson, Don Dussault, Jason J. Keleher
Format: Article
Language:English
Published: American Chemical Society 2022-07-01
Series:ACS Omega
Online Access:https://doi.org/10.1021/acsomega.2c00683

Internet

https://doi.org/10.1021/acsomega.2c00683

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