The effect of electron dose on positive polymethyl methacrylate resist for nanolithography of gold bowtie nanoantennas
Plasmonic structures, such as bowtie nanoantennas, may be used in Surface Enhanced Raman Spectroscopy (SERS). Nanoantennas can be employed to amplify the biomolecular and chemical reactions, which is useful for biomedical applications. The electric field created by nanoantennas are optimized when th...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2022-05-01
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Series: | Heliyon |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2405844022007630 |