The effect of electron dose on positive polymethyl methacrylate resist for nanolithography of gold bowtie nanoantennas

Plasmonic structures, such as bowtie nanoantennas, may be used in Surface Enhanced Raman Spectroscopy (SERS). Nanoantennas can be employed to amplify the biomolecular and chemical reactions, which is useful for biomedical applications. The electric field created by nanoantennas are optimized when th...

Full description

Bibliographic Details
Main Authors: Caroline Campbell, Abigail Casey, Gregory Triplett
Format: Article
Language:English
Published: Elsevier 2022-05-01
Series:Heliyon
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2405844022007630