Primary converters microsensor speedups and pressures on diamond materials
The article presents the design, manufacturing techniques and the scheme of parameter measuring of primary transducers for acceleration and pressure microsensors based on diamond materials. There have been described the designing procedure and an experimental way of definition of microsensors'...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2009-08-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | http://www.tkea.com.ua/tkea/2009/4_2009/pdf/04.zip |