Measurement and Characterization of Rotational Errors of Aerostatic Bearings in Subnanometer Accuracy
Measuring the running accuracy of aerostatic bearings is challenging because of the high-precision requirements in rotational motion. This paper presents an ultra-high precision measurement method for aerostatic bearings using atomic force microscopy (AFM) as the displacement sensor. The Donaldson r...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-10-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/10/1952 |