A practical perspective for chromatic orthogonality for implementing in photolithography
Abstract Theoretically, it is more challenging to anticipate the conversion and selectivity of a photochemical experiment compared to thermally generated reactivity. This is due to the interaction of light with a photoreactive substrate. Photochemical reactions do not yet receive the same level of b...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2023-01-01
|
| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-023-27869-w |