Design of piezoresistive pressure sensor for enhancing stress of MEMS cantilever
In the automotive, aerospace, biomedical, and home appliance industries, piezoresistive pressure sensors were among the earliest MEMS products created. Piezoresistive microcantilever sensor is one of the promising mechanical microsensors that have been around for many years. Microcantilevers are mec...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-02-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917422002719 |