Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures

Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures

The piezoelectric thin film composed of single-crystal lithium niobate (LiNbO<sub>3</sub>) exhibits a remarkably high electromechanical coupling coefficient and minimal intrinsic losses, making it an optimal material for fabricating bulk acoustic wave resonators. However, contemporary fi...

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Bibliographic Details
Main Authors: Yi Zhang, Yang Jiang, Chuying Tang, Chenkai Deng, Fangzhou Du, Jiaqi He, Qiaoyu Hu, Qing Wang, Hongyu Yu, Zhongrui Wang
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Micromachines
Subjects:
lithium niobate
acoustic resonators
A1 mode
spurious modes
power capacity
Online Access:https://www.mdpi.com/2072-666X/15/2/195

Internet

https://www.mdpi.com/2072-666X/15/2/195

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