Pursuit of hidden rules behind the irregularity of nano capillary lithography by hybrid intelligence
Abstract Nature finds a way to leverage nanotextures to achieve desired functions. Recent advances in nanotechnologies endow fascinating multi-functionalities to nanotextures by modulating the nanopixel’s height. But nanoscale height control is a daunting task involving chemical and/or physical proc...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2023-08-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-023-41022-7 |