Scalable methods for ultra-smooth platinum in nanoscale devices
Ultra-smooth metal structures are increasingly important in nanoscale device applications, from photonics to molecular electronics and 2D material growth. We describe three methods for achieving ultra-smooth platinum: patterned template stripping, chemical mechanical polishing and giant grain growth...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2019-05-01
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| Series: | Micro and Nano Engineering |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007219300206 |