Vapor deposition routes to conformal polymer thin films
Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic th...
| Egile Nagusiak: | , , |
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| Formatua: | Artikulua |
| Hizkuntza: | English |
| Argitaratua: |
Beilstein-Institut
2017-03-01
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| Saila: | Beilstein Journal of Nanotechnology |
| Gaiak: | |
| Sarrera elektronikoa: | https://doi.org/10.3762/bjnano.8.76 |