Vapor deposition routes to conformal polymer thin films
Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic th...
| Príomhchruthaitheoirí: | , , |
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| Formáid: | Alt |
| Teanga: | English |
| Foilsithe / Cruthaithe: |
Beilstein-Institut
2017-03-01
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| Sraith: | Beilstein Journal of Nanotechnology |
| Ábhair: | |
| Rochtain ar líne: | https://doi.org/10.3762/bjnano.8.76 |
| _version_ | 1830482042399227904 |
|---|---|
| author | Priya Moni Ahmed Al-Obeidi Karen K. Gleason |
| author_facet | Priya Moni Ahmed Al-Obeidi Karen K. Gleason |
| author_sort | Priya Moni |
| collection | DOAJ |
| description | Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films. |
| first_indexed | 2024-12-21T17:27:56Z |
| format | Article |
| id | doaj.art-570bfc22f1b84b44abcf9a0c954d67a5 |
| institution | Directory Open Access Journal |
| issn | 2190-4286 |
| language | English |
| last_indexed | 2024-12-21T17:27:56Z |
| publishDate | 2017-03-01 |
| publisher | Beilstein-Institut |
| record_format | Article |
| series | Beilstein Journal of Nanotechnology |
| spelling | doaj.art-570bfc22f1b84b44abcf9a0c954d67a52022-12-21T18:56:00ZengBeilstein-InstitutBeilstein Journal of Nanotechnology2190-42862017-03-018172373510.3762/bjnano.8.762190-4286-8-76Vapor deposition routes to conformal polymer thin filmsPriya Moni0Ahmed Al-Obeidi1Karen K. Gleason2Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Ave, Cambridge, MA 02139, USADepartment of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Ave, Cambridge, MA 02139, USADepartment of Chemical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Ave, Cambridge, MA 02139, USAVapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films.https://doi.org/10.3762/bjnano.8.76conformalpolymersthin filmsvapor deposition |
| spellingShingle | Priya Moni Ahmed Al-Obeidi Karen K. Gleason Vapor deposition routes to conformal polymer thin films Beilstein Journal of Nanotechnology conformal polymers thin films vapor deposition |
| title | Vapor deposition routes to conformal polymer thin films |
| title_full | Vapor deposition routes to conformal polymer thin films |
| title_fullStr | Vapor deposition routes to conformal polymer thin films |
| title_full_unstemmed | Vapor deposition routes to conformal polymer thin films |
| title_short | Vapor deposition routes to conformal polymer thin films |
| title_sort | vapor deposition routes to conformal polymer thin films |
| topic | conformal polymers thin films vapor deposition |
| url | https://doi.org/10.3762/bjnano.8.76 |
| work_keys_str_mv | AT priyamoni vapordepositionroutestoconformalpolymerthinfilms AT ahmedalobeidi vapordepositionroutestoconformalpolymerthinfilms AT karenkgleason vapordepositionroutestoconformalpolymerthinfilms |