Vapor deposition routes to conformal polymer thin films
Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic th...
| Główni autorzy: | , , |
|---|---|
| Format: | Artykuł |
| Język: | English |
| Wydane: |
Beilstein-Institut
2017-03-01
|
| Seria: | Beilstein Journal of Nanotechnology |
| Hasła przedmiotowe: | |
| Dostęp online: | https://doi.org/10.3762/bjnano.8.76 |