Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification

Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification

Abstract Grayscale structured surfaces with nanometer-scale features are used in a growing number of applications in optics and fluidics. Thermal scanning probe lithography achieves a lateral resolution below 10 nm and a vertical resolution below 1 nm, but its maximum depth in polymers is limited. H...

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Bibliographic Details
Main Authors: Berke Erbas, Ana Conde-Rubio, Xia Liu, Joffrey Pernollet, Zhenyu Wang, Arnaud Bertsch, Marcos Penedo, Georg Fantner, Mitali Banerjee, Andras Kis, Giovanni Boero, Juergen Brugger
Format: Article
Language:English
Published: Nature Publishing Group 2024-02-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-024-00655-y

Internet

https://doi.org/10.1038/s41378-024-00655-y

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