Optimal design and analysis of a new thermally actuated microscanner of high precision
A design of a precise, thermally actuated microscanner is proposed, and next, its thermal and mechanical behaviour is considered. The device consists of a micromirror and four thermo-bimorph cantilevers with electric resistors. After the forming process, the mirror assumes an out-of-plane rest p...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2008-07-01
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| Series: | International Journal for Simulation and Multidisciplinary Design Optimization |
| Subjects: | |
| Online Access: | https://www.ijsmdo.org/articles/smdo/pdf/2008/03/asmdo3208.pdf |