Optimal design and analysis of a new thermally actuated microscanner of high precision
A design of a precise, thermally actuated microscanner is proposed, and next, its thermal and mechanical behaviour is considered. The device consists of a micromirror and four thermo-bimorph cantilevers with electric resistors. After the forming process, the mirror assumes an out-of-plane rest p...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2008-07-01
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| Series: | International Journal for Simulation and Multidisciplinary Design Optimization |
| Subjects: | |
| Online Access: | https://www.ijsmdo.org/articles/smdo/pdf/2008/03/asmdo3208.pdf |
| Summary: | A design of a precise, thermally actuated microscanner is proposed, and
next, its thermal and mechanical behaviour is considered. The device
consists of a micromirror and four thermo-bimorph cantilevers with electric
resistors. After the forming process, the mirror assumes an out-of-plane
rest position. The process is very simple and compatible with the IC
fabrication technique. The mirror is capable of two-dimensional (2D) scans
for optical raster imaging. The scanner works both in a non-resonance (for
the frame scanning) and resonance mode (for the raster scanning). The high
precision of scanning action is achieved due to a special position of the
mirror rotation axes with respect to the cantilever beams. The above
position assures, that the distance of the mirror centre from the light
source is the same during the whole scanning process and the inertial
moments of movable parts, as well as the influence of air damping, are
minimized. To find the optical angle amplitudes of the mirror, deflections of
the cantilevers caused by changes of temperature are determined. The
analysis of dynamic temperature distribution enables to determine the
thermal cut-off frequency, below which the amplitude of mirror deflections
is frequency-independent. To find the resonance frequencies of the device,
the dynamical analysis of the scanner is performed and free vibrations of
the considered system are examined. |
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| ISSN: | 1779-627X 1779-6288 |