MEMS based metal oxide semiconductor carbon dioxide gas sensor

MEMS based metal oxide semiconductor carbon dioxide gas sensor

This paper describes the design and development of low power Micro Electro Mechanical Systems (MEMS) microheater and metal oxide semiconductor CO2 sensor. To achieve low power, suspended plasma enhanced chemical vapour deposited SiO2 diaphragm is used. BaTiO3-CuO is considered as metal oxide doped w...

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Bibliographic Details
Main Authors: H.R. Shwetha, S.M. Sharath, B. Guruprasad, S.B. Rudraswamy
Format: Article
Language:English
Published: Elsevier 2022-08-01
Series:Micro and Nano Engineering
Subjects:
COMSOL Multiphysics
Gas sensor
Low power
Metal oxide semiconductor
Microheater
Carbon dioxide
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007222000533

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http://www.sciencedirect.com/science/article/pii/S2590007222000533

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