New technique to synthesize silicon nitride nanopowder by discharge-assisted reaction of silane and ammonia
In this work, the chemical reaction of silane and ammonia gases was induced and assisted by electric power transferred to the reaction volume throughout argon discharge at pressures of about 3 mbar. This power was applied to the reaction volume as short pulses with different durations to produce hig...
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| Format: | Article |
| Language: | English |
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IOP Publishing
2021-01-01
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| Series: | Materials Research Express |
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| Online Access: | https://doi.org/10.1088/2053-1591/ac16ad |