Measuring picometre-level displacements using speckle patterns produced by an integrating sphere
Abstract As the fields of optical microscopy, semiconductor technology and fundamental science increasingly aim for precision at or below the nanoscale, there is a burgeoning demand for sub-nanometric displacement and position sensing. We show that the speckle patterns produced by multiple reflectio...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2023-09-01
|
| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-023-40518-6 |