Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change

Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change

Self-calibration capabilities for flexible pressure sensors are greatly needed for fluid dynamic analysis, structure health monitoring and wearable sensing applications to compensate, in situ and in real time, for sensor drifts, nonlinearity effects, and hysteresis. Currently, very few self-calibrat...

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Bibliographic Details
Main Authors: Yuhong Kang, Scott Mouring, Albrey de Clerck, Shuo Mao, Wing Ng, Hang Ruan
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Sensors
Subjects:
self-calibrating
flexible
phase change
two phase
pressure sensor
MEMS
Online Access:https://www.mdpi.com/1424-8220/22/24/9737

Internet

https://www.mdpi.com/1424-8220/22/24/9737

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