Research on High-Precision Position Detection Based on a Driven Laser Spot in an Extreme Ultraviolet Light Source

Laser-spot-location detection technology based on photodetectors is widely used in the aerospace, medical, military and communication fields. However, most of the current research focuses on continuous laser detection in the visible and near-infrared bands, and the real-time high-precision position...

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Detalhes bibliográficos
Principais autores: Rui Bao, Deyang Yu, Fei Chen, Zhe Lv, Jun Xue, Qikun Pan, Ranran Zhang
Formato: Artigo
Idioma:English
Publicado em: MDPI AG 2024-01-01
coleção:Photonics
Assuntos:
Acesso em linha:https://www.mdpi.com/2304-6732/11/1/75