Research on High-Precision Position Detection Based on a Driven Laser Spot in an Extreme Ultraviolet Light Source
Laser-spot-location detection technology based on photodetectors is widely used in the aerospace, medical, military and communication fields. However, most of the current research focuses on continuous laser detection in the visible and near-infrared bands, and the real-time high-precision position...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-01-01
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| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/11/1/75 |