Coaxial displacement sensor using a lateral shear interferometer with a phase grating
As a new non-contact method of measuring object displacement, a coaxial displacement sensor using a lateral shear interferometer with a phase grating is proposed. This proposed method uses a phase grating to generate fringes for the evaluation of displacement by means of spatial frequency analysis....
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421000477 |