Uniform Oxide Layer Integration in Amorphous IGZO Thin Film Transistors for Enhanced Multilevel-Cell NAND Memory Performance

In this work, the implementation of HfZrO layers for the tunneling, charge trapping, and blocking mechanisms within the device offer benefits in terms of programmability and data retention. This configuration has resulted in a memory device that can achieve a significant difference in threshold volt...

Full description

Bibliographic Details
Main Authors: Zeyang Xiang, Kexiang Wang, Jie Lu, Zixuan Wang, Huilin Jin, Ranping Li, Mengrui Shi, Liuxuan Wu, Fuyu Yan, Ran Jiang
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/14/6/2588
_version_ 1797242133011234816
author Zeyang Xiang
Kexiang Wang
Jie Lu
Zixuan Wang
Huilin Jin
Ranping Li
Mengrui Shi
Liuxuan Wu
Fuyu Yan
Ran Jiang
author_facet Zeyang Xiang
Kexiang Wang
Jie Lu
Zixuan Wang
Huilin Jin
Ranping Li
Mengrui Shi
Liuxuan Wu
Fuyu Yan
Ran Jiang
author_sort Zeyang Xiang
collection DOAJ
description In this work, the implementation of HfZrO layers for the tunneling, charge trapping, and blocking mechanisms within the device offer benefits in terms of programmability and data retention. This configuration has resulted in a memory device that can achieve a significant difference in threshold voltage of around 2 V per memory level. This difference is crucial for effectively distinguishing between multiple levels of memory in MLC applications. Additionally, the device operates at low programming voltages below 14 V. Furthermore, the device showcases impressive endurance and data retention capabilities, maintaining a large memory window over extended periods and under varying temperature conditions. The advancement in the a-IGZO-based memory device, characterized by its uniform oxide stacking, presents a viable solution to the industry’s requirement for memory storage options that are efficient, dependable, and economical.
first_indexed 2024-04-24T18:34:22Z
format Article
id doaj.art-58524cfb35514c449f7ebcd073678929
institution Directory Open Access Journal
issn 2076-3417
language English
last_indexed 2024-04-24T18:34:22Z
publishDate 2024-03-01
publisher MDPI AG
record_format Article
series Applied Sciences
spelling doaj.art-58524cfb35514c449f7ebcd0736789292024-03-27T13:20:10ZengMDPI AGApplied Sciences2076-34172024-03-01146258810.3390/app14062588Uniform Oxide Layer Integration in Amorphous IGZO Thin Film Transistors for Enhanced Multilevel-Cell NAND Memory PerformanceZeyang Xiang0Kexiang Wang1Jie Lu2Zixuan Wang3Huilin Jin4Ranping Li5Mengrui Shi6Liuxuan Wu7Fuyu Yan8Ran Jiang9Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, ChinaFaculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, ChinaFaculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, ChinaFaculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, ChinaFaculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, ChinaFaculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, ChinaFaculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, ChinaFaculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, ChinaFaculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, ChinaFaculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, ChinaIn this work, the implementation of HfZrO layers for the tunneling, charge trapping, and blocking mechanisms within the device offer benefits in terms of programmability and data retention. This configuration has resulted in a memory device that can achieve a significant difference in threshold voltage of around 2 V per memory level. This difference is crucial for effectively distinguishing between multiple levels of memory in MLC applications. Additionally, the device operates at low programming voltages below 14 V. Furthermore, the device showcases impressive endurance and data retention capabilities, maintaining a large memory window over extended periods and under varying temperature conditions. The advancement in the a-IGZO-based memory device, characterized by its uniform oxide stacking, presents a viable solution to the industry’s requirement for memory storage options that are efficient, dependable, and economical.https://www.mdpi.com/2076-3417/14/6/2588homogeneous oxide stackingmultilevel-cell (MLC) NAND memoryhafnium-zirconium oxide (HfZrO)charge trap memory (CTM)
spellingShingle Zeyang Xiang
Kexiang Wang
Jie Lu
Zixuan Wang
Huilin Jin
Ranping Li
Mengrui Shi
Liuxuan Wu
Fuyu Yan
Ran Jiang
Uniform Oxide Layer Integration in Amorphous IGZO Thin Film Transistors for Enhanced Multilevel-Cell NAND Memory Performance
Applied Sciences
homogeneous oxide stacking
multilevel-cell (MLC) NAND memory
hafnium-zirconium oxide (HfZrO)
charge trap memory (CTM)
title Uniform Oxide Layer Integration in Amorphous IGZO Thin Film Transistors for Enhanced Multilevel-Cell NAND Memory Performance
title_full Uniform Oxide Layer Integration in Amorphous IGZO Thin Film Transistors for Enhanced Multilevel-Cell NAND Memory Performance
title_fullStr Uniform Oxide Layer Integration in Amorphous IGZO Thin Film Transistors for Enhanced Multilevel-Cell NAND Memory Performance
title_full_unstemmed Uniform Oxide Layer Integration in Amorphous IGZO Thin Film Transistors for Enhanced Multilevel-Cell NAND Memory Performance
title_short Uniform Oxide Layer Integration in Amorphous IGZO Thin Film Transistors for Enhanced Multilevel-Cell NAND Memory Performance
title_sort uniform oxide layer integration in amorphous igzo thin film transistors for enhanced multilevel cell nand memory performance
topic homogeneous oxide stacking
multilevel-cell (MLC) NAND memory
hafnium-zirconium oxide (HfZrO)
charge trap memory (CTM)
url https://www.mdpi.com/2076-3417/14/6/2588
work_keys_str_mv AT zeyangxiang uniformoxidelayerintegrationinamorphousigzothinfilmtransistorsforenhancedmultilevelcellnandmemoryperformance
AT kexiangwang uniformoxidelayerintegrationinamorphousigzothinfilmtransistorsforenhancedmultilevelcellnandmemoryperformance
AT jielu uniformoxidelayerintegrationinamorphousigzothinfilmtransistorsforenhancedmultilevelcellnandmemoryperformance
AT zixuanwang uniformoxidelayerintegrationinamorphousigzothinfilmtransistorsforenhancedmultilevelcellnandmemoryperformance
AT huilinjin uniformoxidelayerintegrationinamorphousigzothinfilmtransistorsforenhancedmultilevelcellnandmemoryperformance
AT ranpingli uniformoxidelayerintegrationinamorphousigzothinfilmtransistorsforenhancedmultilevelcellnandmemoryperformance
AT mengruishi uniformoxidelayerintegrationinamorphousigzothinfilmtransistorsforenhancedmultilevelcellnandmemoryperformance
AT liuxuanwu uniformoxidelayerintegrationinamorphousigzothinfilmtransistorsforenhancedmultilevelcellnandmemoryperformance
AT fuyuyan uniformoxidelayerintegrationinamorphousigzothinfilmtransistorsforenhancedmultilevelcellnandmemoryperformance
AT ranjiang uniformoxidelayerintegrationinamorphousigzothinfilmtransistorsforenhancedmultilevelcellnandmemoryperformance