Ultrafast 3D nanofabrication via digital holography
The application of two-photon lithography has been limited by the low writing speed. The authors reported a multi-focus improved lithography platform that employs up to 2000 laser foci to perform parallel fabrication with 90 nm resolution via optimised polymerisation and single-pulse printing strate...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2023-03-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-023-37163-y |