Surface Wettability Tuning of Acrylic Resin Photoresist and Its Aging Performance
Photoresist is the key material in the fabrication of micropatterns or microstructures. Tuning the surface wettability of photoresist film is a critical consideration in its application of microfluidics. In this work, the surface wettability tuning of acrylic resin photoresist by oxygen plasma or ul...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-07-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/14/4866 |