Surface Wettability Tuning of Acrylic Resin Photoresist and Its Aging Performance

Surface Wettability Tuning of Acrylic Resin Photoresist and Its Aging Performance

Photoresist is the key material in the fabrication of micropatterns or microstructures. Tuning the surface wettability of photoresist film is a critical consideration in its application of microfluidics. In this work, the surface wettability tuning of acrylic resin photoresist by oxygen plasma or ul...

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Bibliographic Details
Main Authors:	Yingying Dou, Fahong Li, Biao Tang, Guofu Zhou
Format:	Article
Language:	English
Published:	MDPI AG 2021-07-01
Series:	Sensors
Subjects:	photoresist contact angle wettability tuning aging
Online Access:	https://www.mdpi.com/1424-8220/21/14/4866

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