Effect of Substrate Bias and Temperature on Friction and Wear Properties for ta-C Coating Prepared under Different Substrate Bias Voltages with Filtered Cathodic Vacuum Arc Deposition
In this paper, the tribological behaviors of 1 μm of tetrahedral amorphous carbon (ta-C) coatings deposited with a different substrate bias of -0 V, -100 V and -300 V are examined under elevated temperature up to 600°C. It is found that wear behavior could be divided into two distinct regions accord...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Japanese Society of Tribologists
2018-10-01
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Series: | Tribology Online |
Subjects: | |
Online Access: | https://www.jstage.jst.go.jp/article/trol/13/5/13_241/_pdf/-char/en |