Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors

Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors

A technique and electronic circuit for contactless electromagnetic interrogation of piezoelectric micro-electromechanical system (MEMS) resonator sensors are proposed. The adopted resonator is an aluminum-nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) disk vibrating in radial contour mode a...

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Bibliographic Details
Main Authors: Marco Baù, Marco Ferrari, Habiba Begum, Abid Ali, Joshua E.-Y. Lee, Vittorio Ferrari
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Sensors
Subjects:
thin-film piezoelectric-on-silicon resonator
aluminum nitride
time-gated technique
contactless interrogation
piezoelectric MEMS resonator
sensors
Online Access:https://www.mdpi.com/1424-8220/20/12/3483

Internet

https://www.mdpi.com/1424-8220/20/12/3483

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