W-Band 4th Order Waveguide Filter Based on Double Layer SU8 Microfabrication
This paper investigates the fabrication accuracy of the W-band SU-8 photoresist micromachined 4th order waveguide bandpass filters (BPF). The designed filter based on cylindrical resonators is excited in TM<sub>010</sub> mode. It is ideally suitable for the layered SU-8 micromachining pr...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-07-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/22/15/5604 |