Morphological characterization and porosity profiles of tantalum glancing-angle-deposited thin films

<p>Glancing angle deposition (GLAD) is a physical vapor deposition (PVD) process using a substrate that rotates tilted at an angle to the evaporation source. Depending on the deposition conditions, it provides the controlled formation of regular nanostructures during the PVD process. As a res...

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Bibliographic Details
Main Authors: T. Ott, G. Gerlach
Format: Article
Language:English
Published: Copernicus Publications 2020-02-01
Series:Journal of Sensors and Sensor Systems
Online Access:https://www.j-sens-sens-syst.net/9/79/2020/jsss-9-79-2020.pdf